Major process changes have occurred in the last few years as advanced semiconductor device technology has narrowed interconnect line widths to 45 nanometers (nm).  These include 300-millimeter (mm) wafer platforms and the use of copper as the interconnect conductor.  Earlier interconnect technology used aluminum and tungsten conductors for multilevel metal interconnects.  As a result of these advances, the semiconductor industry must now treat wastewater from various processes associated with the use of copper.

Download the complete article (Reproduced with permission from Ultrapure Water, Novermber 2006)

More Information
CuCMP Wastewater Treatment & Recycle product page
Case Study: Copper CMP/CMP Wastewater Treatment – A Classical Method with a Recycling Twist
Brochure: CMP Wastewater Treatment Recovery and Reclaim Methods

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