Advanced Oxidation Processes

Siemens advanced oxidation process is an effective method for removing total organic carbon (TOC) in point-of-use (POU) ultrapure water treatment systems for semiconductor applications.

Vanox™ Advanced Oxidation POU system

Our proprietary advanced oxidation process can consistently reduce TOC to 0.5 parts per billion (ppb) and treat seasonal TOC variations in feed water. This is important because TOC elevations above 1.0 ppb can directly affect the manufacturing process.

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Advanced Oxidation Process Benefits:

Consistently reduce TOC to 0.5 ppb
Removes trace organics such as Urea, IPA and THMs
Maintains consistent process control during seasonal variations in feed water
Consistent statistical control on manufacturing yields
Eliminates temperature, TOC and particle variations in the process

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Contact Us:

For more information about advanced oxidation, contact the Siemens Information Desk, Monday through Friday, 8 a.m. to 5 p.m., Eastern Standard Time: 1.866.926.8420 or 1.724.772.1402 or information.water@siemens.com

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Featured Advanced Oxidation Process Systems:

Vanox™ System for Point-of-Use Ultrapure
Water Treatment Systems

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