Vanox™ POU System

Vanox™ AOP System

The point-of-use platform provides critical flow to specific process stages that require low organic carbon contamination, low particles, tight temperature controlled tolerance, pressure, gases and metals. Ideally suited for immersion lithography toolsets this water not only extends the life of the lens, but provides the specific environment for superior process control. When tracking down yield or parametric issues as you ramp a new technology the last thing a process engineer wants to question is their facility support. This is why Vanox POU is found not only in mature factory lines but also are key tools being utilized in the 450 mm factories of tomorrow.

Organic species targeted reduction for Fab wide UPW feed for flows in the hundreds to thousands of gallons. Customers that initially realized the benefit of the the Siemens Vanox POU tools soon discovered that lowering their overall organic contamination exposure to their product resulted in greater performance. The demand for a platform that could treat their entire process loop was created out of this demand. Capable of treating hundreds or thousands of gallons of water this solution is not only modular but also provided the process engineers with setpoint flexibility.